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Browsing by Author "Ahn, J.Y."

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    Development of a DRAM compatible Cu contact using self-aligned Ta-silicide and Ta-barrier

    Zhao, Chao
    ;
    Demuynck, Steven  
    ;
    Tokei, Zsolt  
    ;
    Horiguchi, Naoto  
    ;
    Ahn, J.Y.
    Oral presentation
    2008, Materials for Advanced Metallization Workshop - MAM

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