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Browsing by Author "Alberga, Gerold"

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    LENS - Lithography enhancement towards nano scale

    Cantu, Pietro
    ;
    Baldi, Livio
    ;
    De Simone, Danilo  
    ;
    Piacentini, Paolo
    ;
    Fliervoet, Timon  
    Oral presentation
    2010, European Nanoelectronics Forum

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