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Browsing by Author "Albert, Maximillian"

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    High-NA Benefit Assessment through ZEISS AIMS EUV for Tip-to-Tip Patterning by EUVL

    Jonckheere, Rik  
    ;
    Kovalevich, Tatiana  
    ;
    Wiaux, Vincent  
    ;
    Philipsen, Vicky  
    ;
    Hendrickx, Eric  
    Proceedings paper
    2024, OPTICAL AND EUV NANOLITHOGRAPHY XXXVII, 2024-02-26, p.1295304

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