Repository logo Institutional repository
  • Communities & Collections
  • Scientific publicationsOpen knowledge
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Ali, Ali Mohamed"

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results per page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Atomic Layer Etching of Nickel Using N2/H2 Plasma Exposure and Hexafluoroacetylacetone

    Ali, Ali Mohamed
    ;
    Krieger, Guillaume  
    ;
    Soulie, Jean-Philippe  
    ;
    Knoops, Harm C. M.  
    Journal article
    2026, ACS APPLIED ELECTRONIC MATERIALS, (8) 9, p.3834-3842

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings