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Browsing by Author "Amanapu, H.P."

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    Investigation of guanidine carbonate-based slurries for chemical Mechanical polishing of Ru/TiN barrier films with minimal corrosion

    Sagi, K.V.
    ;
    Amanapu, H.P.
    ;
    Teugels, Lieve  
    ;
    Babu, S.V.
    Journal article
    2014, ECS Journal of Solid State Science and Technology, (3) 7, p.P227-P234

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