Browsing by Author "Amanapu, Hariprasad"
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Publication Role of ruthenium texture and guanidine carbonate on chemical mechanical polishing of ruthenium films
Journal article2013, ECS Journal of Solid State Science and Technology, (2) 11, p.P445-P451Publication The effect of material texture in the CMP of ruthenium films
Proceedings paper2013, 18th International Symposium on Chemical-Mechanical Planarization - CAMP, 11/08/2013