Browsing by Author "Anderson, Nigel"
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Publication Gas stream analysis and PFC recovery in a semiconductor process
Proceedings paper1997, Environmental, Safety, and Health Issues in IC Production, 4/12/1996, p.55-60Publication Generation and transport of corrosion products in HCL gas lines
Journal article1997, Future Fab International, (1) 2, p.283-288Publication Generation and transport of corrosion products in HCl gas lines
Proceedings paper1996, Proceedings of the 3rd International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSS, 23/09/1996, p.69-72Publication Metallic contaminants generation from tubing during start-up and following moisture upsets in HCl distribution systems
Proceedings paper1997, Proceedings IEEE International Symposium on Semiconductor Manufacturing - ISSM, 6/10/1997, p.77-80