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Browsing by Author "André, N."

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    One-mask CMOS compatible process for the fabrication of three-dimensional self-assembled thin-film SOI microelectromechanical systems

    Iker, Francois
    ;
    André, N.
    ;
    Pardoen, T.
    ;
    Raskin, J.P.
    Journal article
    2005, Electrochemical and Solid State Letters, (8) 10, p.H87-H89

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