Repository logo Institutional repository
  • Communities & Collections
  • Scientific publicationsOpen knowledge
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Andreas, M."

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results per page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Particle removal and damage thresholds from particle removal and damage formation frequency for high-velocity-aerosol cleaning

    Wostyn, Kurt  
    ;
    Wada, Masayuki
    ;
    Andreas, M.
    ;
    Kenis, Karine  
    ;
    Roussel, Philippe  
    ;
    Bearda, Twan
    Proceedings paper
    2009, Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing 11, 4/10/2009, p.211-217

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings