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Browsing by Author "Angelberger, W."

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    Characterization of interstitial related defects in p-silicon substrates by homoepitaxial

    Schmolke, R.
    ;
    Angelberger, W.
    ;
    von Ammon, W.
    ;
    Bender, Hugo  
    Proceedings paper
    2001, GADEST 2001 - Proceedings of the 9th International Autumn Meeting Gettering and Defect Engineering in Semiconductor Technology;, p.231

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