Browsing by Author "Ansar, Sheik"
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Publication An improved CMP process for integration of high mobility channel materials
Meeting abstract2016, International Conference on Planarization Technology - ICPT, 17/10/2016Publication CMP on SiGe materials - linking chemical and physical properties to design low defect selective slurries
Meeting abstract2014, International Conference on Planarization Technology - ICPT, 19/11/2014