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Browsing by Author "Anwand, W"

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    Formation of germanium shallow junction by flash annealing

    Satta, Alessandra
    ;
    D'Amore, Antonio
    ;
    Simoen, Eddy  
    ;
    Anwand, W
    ;
    Skorupa, W
    ;
    Clarysse, Trudo
    Journal article
    2007, Nuclear Instruments and Methods B, (257) 1_2, p.157-160

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