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Browsing by Author "Aoyama, Takayuki"

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    Nanometer-deep junctions with high doping concentration for Ge SDEs using solid-source doping and flash lamp annealing

    Tanimura, Hideaki
    ;
    Fuse, Kazuhiko
    ;
    Yamada, Takahiro
    ;
    Aoyama, Takayuki
    ;
    Kato, Shinichi
    Proceedings paper
    2017-06, 17th International Workshop on Junction Technology - IWJT, 1/06/2017, p.15-18

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