Browsing by Author "Arao, H."
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Publication Non-destructive determination of pore size distribution of low-k porous SOG films
;Baklanov, Mikhaïl ;Kondoh, Eiichi ;Gidley, D. ;Lin, E. ;Wu, Wen ;Arao, H.Mogilnikov, K. P.Oral presentation2000, 60th Japan Society of Applied Physics Autumn Meeting; September 2000; Japan.