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Browsing by Author "Arao, H."

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    Non-destructive determination of pore size distribution of low-k porous SOG films

    Baklanov, Mikhaïl
    ;
    Kondoh, Eiichi
    ;
    Gidley, D.
    ;
    Lin, E.
    ;
    Wu, Wen
    ;
    Arao, H.
    ;
    Mogilnikov, K. P.
    Oral presentation
    2000, 60th Japan Society of Applied Physics Autumn Meeting; September 2000; Japan.

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