imec Institutional Repository Browsing {{ collection }} by Author "Archer, L."

Publication

A study in interactions of plasmas and wet cleans with ULK materials

Xu, Kaidong

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Kraus, Harald

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Henry, Sally - Ann

Proceedings paper

2007, 1st International Workshop Plasma Etch and Strip in Microelectronics - PESM, 10/09/2007

Publication

Modifications of porous low-k by plasma treatments and wet cleans

Xu, Kaidong

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Henry, Sally-Ann

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Kraus, Harald

Proceedings paper

2007, Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing 10, 7/10/2007, p.409-416

Publication

Post salicidation clean: selective removal of un-reacted NiPt towards NiPtSi(Ge)

Xu, Kaidong

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Lauwers, Anne

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Vos, Rita

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Archer, L.

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Kraus, Harald

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Demeurisse, Caroline

Proceedings paper

2007, Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing 10, 7/10/2007, p.327-334

Browsing by Author "Archer, L."