Repository logo Institutional repository
  • Communities & Collections
  • Scientific publicationsOpen knowledge
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Arjavac, Jason"

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results per page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    EUV photoresist reference metrology using TEM tomography

    Biedrzycki, Mark
    ;
    Adiga, Umesh
    ;
    Barnum, Andrew
    ;
    Moussa, Alain  
    ;
    Arjavac, Jason
    ;
    Haynes, Rose Marie
    Proceedings paper
    2020, Metrology, Inspection, and Process Control for Microlithography XXXIV, 23/02/2020, p.113251T

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings