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Browsing by Author "Asakuma, S."

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    Evaluation of an advanced organic ultra-low-k material

    Ferchichi, Abdelkarim
    ;
    Travaly, Youssef
    ;
    Carbonell, Laure
    ;
    Vanstreels, Kris  
    ;
    Beyer, Gerald  
    Proceedings paper
    2009, Advanced Metallization Conference 2008 (AMC 2008), 23/09/2008, p.587-592
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    Process compatibility of new advanced low-k dielectric

    Ferchichi, Abdelkarim
    ;
    Vanstreels, Kris  
    ;
    Heylen, Nancy  
    ;
    Beyer, Gerald  
    ;
    Baklanov, Mikhaïl
    Meeting abstract
    2009, 216th ECS Meeting, 1/10/2009, p.2158

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