Browsing by Author "Asano, Yusuke"

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Directed self-assembly of silicon-containing block copolymers for 20nm lithography

Blachut, Gregory
;
Sirard, Stephen
;
Maher, Michael
;
Asano, Yusuke
;
Someya, Yasunobu
;
Lane, Austin
Oral presentation
2016, SPIE Advanced Lithography Conference
Directed self-assembly of silicon-containing block copolymers with a hybrid chemo-/grapho-epitaxial flow

Blachut, Gregory
;
Sirard, Stephen
;
Maher, Michael
;
Asano, Yusuke
;
Someya, Yasunobu
;
Lane, Austin
Oral presentation
2016, ACS Spring Meeting
High chi block copolymers: a progress report

Willson, Grant
;
Blachut, Greg
;
Maher, Michael
;
Durand, William
;
Asano, Yusuke
;
Someya, Yasunobu
Proceedings paper
2015, 1st International Symposium on DSA, 26/10/2015
Optimizing surface treatments for the directed self-assembly of silicon-containing block copolymers

Blachut, Greg
;
Siarard, Stephen
;
Maher, Michael
;
Asano, Yusuke
;
Someya, Yasunobu
;
Lane, Austin
Oral presentation
2016, ACS Spring Meeting