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Browsing by Author "Azioune, Ammar"

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    Removal of plasma-modified low-k layer using dilute HF: influence of concentration

    Le, Quoc Toan  
    ;
    Baklanov, Mikhaïl
    ;
    Kesters, Els  
    ;
    Azioune, Ammar
    ;
    Struyf, Herbert  
    ;
    Boullart, Werner  
    Journal article
    2005-07, Electrochemical and Solid-State Letters, (8) 7, p.F21-F24

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