Browsing by Author "Azordegan, A."
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Publication Full spectral analysis of line edge roughness
Proceedings paper2005, Metrology, Inspection, and Process Control for Microlithography XIX, 28/02/2005, p.499-509Publication Impact of LER and CDU on device performance
Proceedings paper2005, Yield Management Solutions Seminar, 15/08/2005Publication On-line spectral analysis of line edge roughness: algorithms qualification and transfer to etch
Journal article2005, Semiconductor FabTech, 25, p.96-101