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Browsing by Author "Béché, Armand"

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    Publication

    Strain measurement in semiconductor FinFET devices using a novel moiré demodulation technique

    Prabhakara, Viveksharma  
    ;
    Jannis, Daen
    ;
    Béché, Armand
    ;
    Bender, Hugo  
    ;
    Verbeeck, Johan
    Journal article
    2020, Semiconductor Science and Technology, (35) 3, p.34002

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