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Browsing by Author "Bai, Kunlun"

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    Comparative stochastic process variation bands for N7, N5, and N3 at EUV

    Vaglio Pret, Alessandro  
    ;
    Graves, Trey
    ;
    Blankenship, David
    ;
    Bai, Kunlun
    ;
    Robertson, Stewart
    Proceedings paper
    2018, Extreme Ultraviolet (EUV) Lithography IX, 12/02/2018, p.105830K

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