Browsing by Author "Bailey, George"
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Publication Double patterning EDA solutions for the 32nm HP and beyond
Proceedings paper2007, Design for Manufacturability through Design-Process Integration, 28/02/2007, p.65211kPublication Validation of immersion lithography OPC model accuracy
Proceedings paper2005, 2nd International Symposium on Immersion Lithography, 12/09/2005