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Browsing by Author "Bailey, George E."

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    Source polarization and OPC effects on illumination optimization

    Brist, Travis
    ;
    Bailey, George E.
    ;
    Drozdov, Alexander
    ;
    Torres, Andres
    ;
    Estroff, Andrew
    Proceedings paper
    2005, 25th Annual BACUS Symposium on Photomask Technology, 3/10/2005, p.599232

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