Repository logo Institutional repository
  • Communities & Collections
  • Scientific publicationsOpen knowledge
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Baiya, Evans"

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results per page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Poly- silicon etch with diluted ammonia: application to replacement gate integration scheme

    Sebaai, Farid  
    ;
    del Agua Borniquel, Jose Ignacio  
    ;
    Vos, Rita  
    ;
    Absil, Philippe  
    ;
    Chiarella, Thomas  
    Journal article
    2009, Solid State Phenomena, 145-146, p.207-210

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings