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Browsing by Author "Ballantyne, Catherine"

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    Characterization and process integration of a low-k spin-on dielectric

    Ballantyne, Catherine
    ;
    Forester, Lynn
    ;
    Waeterloos, Joost
    Oral presentation
    1996, International Conference on Metallurgical Coatings and Thin Films; April 22-26, 1996; San Diego, Calif., USA.

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