Browsing by Author "Baralia, Gabriel"
Now showing 1 - 1 of 1
- Results Per Page
- Sort Options
Publication EUV mask repair using a combination of focused-electron-beam-induced processing and vacuum Atomic Force Microscopy
;Bret, Tristan ;Baralia, Gabriel ;Baur, Christof ;Budach, MichaelHofmann, ThorstenOral presentation2011, 55th International conference on Electron, Ion and Photon Beam Technology and Nanofabrication - EIPBN