Repository logo Institutional repository
  • Communities & Collections
  • Browse
  • Site
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Barkema, Gerard"

Filter results by typing the first few letters
Now showing 1 - 3 of 3
  • Results Per Page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Integrated diffusion - recombination model for describing the logarithmic time dependence of plasma damage in porous low-k materials

    Kunnen, Eddy
    ;
    Barkema, Gerard
    ;
    Maes, Christian
    ;
    Shamiryan, Denis
    ;
    Urbanowicz, Adam
    Meeting abstract
    2010, Materials for Advanced Metallization - MAM, 8/03/2010
  • Loading...
    Thumbnail Image
    Publication

    Integrated diffusion-recombination model for describing the logarithic time dependency of plasma damage in porous low-k materials

    Kunnen, Eddy
    ;
    Barkema, Gerard
    ;
    Maes, Christian
    ;
    Shamiryan, Denis
    ;
    Urbanowicz, Adam
    Journal article
    2011, Microelectronic Engineering, (88) 5, p.631-634
  • Loading...
    Thumbnail Image
    Publication

    Saturation of front propagation in a reaction-diffusion process describing plasma damage in porous low-k materials

    Safaverdi, Soghra
    ;
    Barkema, Gerard
    ;
    Kunnen, Eddy
    ;
    Urbanowicz, Adam
    ;
    Maes, Christian
    Journal article
    2011, Physical Review B, (83) 24, p.245320

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings