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Browsing by Author "Baron, S."

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    Freeform illumination sources: an experimental study of source-mask optimization for 22nm SRAM cells

    Bekaert, Joost  
    ;
    Laenens, Bart
    ;
    Verhaegen, Staf
    ;
    Van Look, Lieve  
    ;
    Trivkovic, Darko  
    Proceedings paper
    2010, Optical Microlithography XXIII, 21/02/2010, p.764008

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