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Browsing by Author "Baron, Stanislas"

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    Freeform illumination sources: Source mask optimization for 22 nm node SRAM

    Bekaert, Joost  
    ;
    Laenens, Bart
    ;
    Verhaegen, Staf
    ;
    Van Look, Lieve  
    ;
    Trivkovic, Darko  
    Proceedings paper
    2009, 6th International Symposium on Immersion Lithography Extensions, 22/10/2009

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