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Browsing by Author "Barry-Porter, Stephen"

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    Effect of 147nm photons on porous Organo-Silicon Glass materials and damage improvement by optimized Cu/low-k integration approaches

    Zhang, Liping  
    ;
    de Marneffe, Jean-Francois  
    ;
    Lukaszewicz, Mikolaj
    ;
    Barry-Porter, Stephen
    Meeting abstract
    2014, AVS 61st International Symposium and Exhibition, 9/11/2014, p.PS-MoM4

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