Browsing by Author "Barthomeuf, Kevin"
Publication Selection of ESH solvents for cleaning applications in semiconductor manufacturing
Oral presentation2008, 11th International Symposium on Particles on Surfaces - POSPublication Selection of ESH solvents for the wet removal of post-etch photoresists in low-k dielectrics integration
Journal article2009, Microelectronic Engineering, (86) 2, p.160-164