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Browsing by Author "Barzegar, Ellaheh"

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    Early defect detection for EUV self-aligned litho-etch litho-etch patterning with EPE

    Anunciado, Roy
    ;
    Lee, Jisun
    ;
    Barzegar, Ellaheh
    ;
    van der Sanden, Stefan
    ;
    Schelcher, Guillaume  
    Proceedings paper
    2022, International Conference on Extreme Ultraviolet Lithography, SEP 26-29, 2022, p.Art. 122920J

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