Browsing by Author "Bast, G."
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Publication 3D-DRAM Si/SiGe superlattices: inspection strategies and evaluation
Proceedings paper2025, 2025 Conference on Metrology Inspection and Process Control-Annual, 2025-02-24, p.1342612-1Publication Detection of crystalline defects in Si/SiGe superlattices towards 3D-DRAM applications
Proceedings paper2024, Conference on Metrology, Inspection, and Process Control XXXVIII, 2024-02-28, p.129551FPublication In-line metrology for characterization and control of extreme wafer thinning of bonded wafers
Proceedings paper2017, 28th Annual SEMI Advanced Semiconductor Manufacturing Conference - ASMC, 15/05/2017, p.331-336