Repository logo Institutional repository
  • Communities & Collections
  • Browse
  • Site
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Bauer, P."

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results Per Page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Low Energy Ion Scattering (LEIS) analysis of ultra-thin Ru layers on Ta- or Mn-based barriers

    Brüner, Philipp
    ;
    Grehl, T.
    ;
    Jourdan, Nicolas  
    ;
    Steinbauer, E.
    ;
    Bauer, P.
    ;
    Brongersma, H.
    Meeting abstract
    2015, 15th International Conference on Atomic Layer Deposition - ALD, 28/06/2015

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings