Repository logo Institutional repository
  • Communities & Collections
  • Browse
  • Site
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Baur, C"

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results Per Page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    The door opener for EUV mask repair

    Waiblinger, Markus
    ;
    Jonckheere, Rik  
    ;
    Bret, Tristan
    ;
    Van Den Heuvel, Dieter  
    ;
    Baur, C
    ;
    Baralia, G
    Proceedings paper
    2012, Photomask and Next-Generation Lithography Mask Technology XIX, 17/04/2012, p.84410F

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings