Browsing by Author "Beebe, M."
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Publication Sputter rate variations in silicon under high k dielectric films
Meeting abstract2003, International Conference on Secondary Ion Mass Spectrometry - SIMS XIV, 14/09/2003, p.82Publication Sputter rate variations in silicon under high-k dielectric films
Journal article2004, Applied Surface Science, 231-232, p.565-568Publication Sputter rate variations in silicon under high-k dielectric films
Proceedings paper2004-05, Proceedings of the Fourteenth Int. Conference on Secondary Ion Mass Spectrometry and Related Topics, 14/09/2003, p.565-568