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Browsing by Author "Beeman, Jeff W."

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    Implantation and activation of phosphorus in amorphous and crystalline Ge on Si

    Lieten, Ruben  
    ;
    Beeman, Jeff W.
    ;
    Simoen, Eddy  
    ;
    Haller, Eugene E.
    ;
    Dekoster, Johan  
    Oral presentation
    2012, E-MRS Spring Meeting Symposium M : More than Moore: Novel materials approaches for functionalized Silicon based Microelectronics

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