Browsing by Author "Beera, Rajan"
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Publication High performance filtration for bulk materials: a novel HDPE membrane filter designed for EUV Lithography
;D'Urzo, Lucia ;Umeda, Toru ;Mizuno, Takehito ;Hattori, Atsushi ;Singh, AmarnauthBeera, RajanProceedings paper2021, Conference on Advances in Patterning Materials and Processes XXXVIII Part of SPIE Advanced Lithography Conference, FEB 22-26, 2021, p.116120H