Browsing by Author "Bellay, L."
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Publication Chemistry of the silicon oxide surface: adsorption from SC1 solutions
Oral presentation1998, 4th International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSSPublication Chemistry of the silicon oxide surface: adsorption from SC1 solutions
Proceedings paper1999, Ultra Clean Processing of Silicon Surfaces; Proceedings of the 4th International Symposium on Ultra Clean Processing of Silicon, 21/09/1998, p.53-58