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Browsing by Author "Ben Yaala, Marwa"

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    Crystal orientation dependent anisotropic dry silicon etching

    Trompoukis, Christos
    ;
    El Daif, Ounsi
    ;
    Verdonck, Patrick  
    ;
    Niesen, Bjoern
    ;
    Ben Yaala, Marwa
    Meeting abstract
    2013, Plasma Etch and Strip in Microtechnology - PESM, 14/03/2013

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