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Browsing by Author "Benett, J."

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    On the reliability of SIMS depth profiles through HfO2-stacks

    Vandervorst, Wilfried  
    ;
    Benett, J.
    ;
    Huyghebaert, Cedric  
    ;
    Conard, Thierry  
    ;
    Gondran, C.
    Meeting abstract
    2003, International Conference on Secondary Ion Mass Spectrometry - SIMS XIV, 14/09/2003, p.83

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