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Browsing by Author "Benk, Marcus"

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    Publication

    Characterization of telecentricity errors in high-numerical-aperture extreme ultraviolet mask images

    Raghunathan, Sudhar
    ;
    Wood, Obert
    ;
    Mangat, Pawitter
    ;
    Verduijn, Erik  
    ;
    Philipsen, Vicky  
    Journal article
    2014, Journal of Vacuum Science and Technology B, (32) 6, p.06F801

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