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Browsing by Author "Bergman, E. J."

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    Pre-diffusion cleaning using ozone and HF

    Bergman, E. J.
    ;
    Lagrange, Sébastien
    ;
    Claes, Martine  
    ;
    De Gendt, Stefan  
    ;
    Röhr, Erika
    Proceedings paper
    2001, Ultra Clean Processing of Silicon Surfaces 2000: Proceedings of the 5th International Conference - UCPSS, 18/09/2000, p.85-88

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