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Browsing by Author "Bertha, Anne"

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    Effect of chemical solutions and surface wettability on the stability of advanced porous low-k materials

    Le, Quoc Toan  
    ;
    Vereecke, Guy  
    ;
    Bertha, Anne
    ;
    Kesters, Els  
    ;
    Lux, Marcel  
    ;
    Struyf, Herbert  
    Proceedings paper
    2011, Materials, Processes, and Reliability for Advanced Interconnects for Micro- and Nanoelectronics, 26/04/2011, p.1335-o03-02

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