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Browsing by Author "Bespalov, Ivan"

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    Extreme ultraviolet induced reactions of tin-oxo cage photoresists

    Sadegh, Najmeh
    ;
    Haitjema, Jarich
    ;
    Zhang, Yu  
    ;
    Wu, Lianjia  
    ;
    Lugier, Olivier
    ;
    Bespalov, Ivan
    Journal article
    2026, JOURNAL OF MATERIALS CHEMISTRY C, (14) 15, p.6177-6189

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