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Browsing by Author "Besson, P."

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    Evolution of silicon cleaning technology over the last twenty years

    Ruzyllo, J.
    ;
    Hattori, T.
    ;
    Novak, R.E.
    ;
    Mertens, Paul  
    ;
    Besson, P.
    Proceedings paper
    2007, Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing 10, 7/10/2007, p.3-7
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    Management of metallic contamination in advanced IC manufacturing

    Besson, P.
    ;
    Bigot, C.
    ;
    Grouillet, A.
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    Joly, J.P.
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    Claes, Martine  
    ;
    Bearda, Twan
    ;
    Frickinger, J.
    Proceedings paper
    2005, Cleaning Technology in Semiconductor Device Manufacturing IX, 16/10/2005, p.3-11

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