Browsing by Author "Besson, P."
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Publication Evolution of silicon cleaning technology over the last twenty years
Proceedings paper2007, Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing 10, 7/10/2007, p.3-7Publication Management of metallic contamination in advanced IC manufacturing
Proceedings paper2005, Cleaning Technology in Semiconductor Device Manufacturing IX, 16/10/2005, p.3-11