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    Fabry-Perot cascade interferometer for temperature measurement of Si microstructures

    Beghuin, Didier
    ;
    Bigeon, John
    ;
    Lopera-Acosta, Maria  
    ;
    Samsom, Hans  
    ;
    Duflos, Frederic  
    Journal article
    2026, APPLIED OPTICS, (65) 10, p.3366-3372

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