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Browsing by Author "Birmpiliotis, Dimitrios"

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    Assessment of dielectric charging in capacitive MEMS switches fabricated on Si substrate with thin oxide film

    Birmpiliotis, Dimitrios
    ;
    Czarnecki, Piotr  
    ;
    Koutsoureli, Matroni
    ;
    Papaioannou, George
    Journal article
    2016, Microelectronic Engineering, 159, p.209-214

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