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Browsing by Author "Bisschop, P."

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    Recent progress in ArF lithography for the 100nm node

    Goethals, Mieke
    ;
    Vandenberghe, Geert  
    ;
    Pollentier, Ivan  
    ;
    Ercken, Monique  
    ;
    Bisschop, P.
    Journal article
    2001, J. Photopolymer Science and Technology, (14) 3, p.333-340

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